| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow passage part that protects a flow passage wall surface constituting a flow passage by a parylene film, which then is hardly detached from the wall surface. <P>SOLUTION: The flow passage part 20 is made of ceramic and includes liquid flow passages (R1-R5) inside for passing liquid. The liquid flow passage includes an efflux opening (lower end of the flow passage R5) which is at one end of the liquid flow passage and makes liquid inside the liquid flow passage flow outside the flow passage part 20. A member (nozzle plate 30) other than the flow passage part 20 is bonded to the outer wall surface (lower surface of the flow passage part 20, lower surface of a ceramic sheet 21) of the flow passage part 20 including the formed efflux opening. A liquid efflux hole 32 is formed on the nozzle plate 30. The flow passage wall surface constituting the liquid flow passage is covered with a protective film 40 of a paraxylylene-based polymer, and the protective film 40 is formed so that its film thickness is smaller as approaching the efflux opening. <P>COPYRIGHT: (C)2013,JPO&INPIT |
