发明名称 DICING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a dicing device, equipped with a plurality of cutting parts, that can quickly re-actuate a cutting part which temporarily stops operating for maintenance etc., without lowering cutting precision. <P>SOLUTION: When two cutting device units are installed side by side, a drain pan 130 and a mist cover 132 are arranged behind cutting parts of the both. An internal spaces thereof is divided by a partition plate 134 into two right and left internal spaces, and the two internal spaces are linked to each other through an opening 136 of the partition plate 134. Consequently, mist and air scattered from a cutting part in operation can be made to fly around to the cutting part which stops operating, so that the cutting part can be held at temperature in operation and quickly re-actuated. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012204461(A) 申请公布日期 2012.10.22
申请号 JP20110065815 申请日期 2011.03.24
申请人 TOKYO SEIMITSU CO LTD 发明人 ITO JUNICHI;SAKATANI YASUYUKI;TAKAHASHI HIDEKI
分类号 H01L21/301 主分类号 H01L21/301
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