发明名称 |
OUT-OF-PLANE SPACER DEFINED ELECTRODE |
摘要 |
In one embodiment, a method of forming an out-of-plane electrode includes providing an oxide layer above an upper surface of a device layer, providing a first cap layer portion above an upper surface of the oxide layer, etching a first electrode perimeter defining trench extending through the first cap layer portion and stopping at the oxide layer, depositing a first material portion within the first electrode perimeter defining trench, depositing a second cap layer portion above the first material portion, vapor releasing a portion of the oxide layer, depositing a third cap layer portion above the second cap layer portion, etching a second electrode perimeter defining trench extending through the second cap layer portion and the third cap layer portion, and depositing a second material portion within the second electrode perimeter defining trench, such that a spacer including the first material portion and the second material portion define out-of-plane electrode. |
申请公布号 |
WO2012142368(A1) |
申请公布日期 |
2012.10.18 |
申请号 |
WO2012US33455 |
申请日期 |
2012.04.13 |
申请人 |
ROBERT BOSCH GMBH;GRAHAM, ANDREW, B.;YAMA, GARY;O'BRIEN, GARY |
发明人 |
GRAHAM, ANDREW, B.;YAMA, GARY;O'BRIEN, GARY |
分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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