Coating substrate in cathodic arc system with spatial separation and simultaneous execution of different groups of process steps, by splitting system objects during process cycle of static arrangement of elementary installation objects

摘要

The process for coating a substrate in a cathodic arc system with a spatial separation and a simultaneous execution of different groups of process steps, comprises: splitting system objects during a process cycle of a static arrangement of elementary installation objects that are housed in a loading chamber, where the installation objects are arranged automatically in a central layer deposition chamber in a planetary-triple-rotor integrated device; and dividing the objects into an elementary piece and unloading the objects after the completion of coating in a cooling chamber. An independent claim is included for a device for coating a substrate in a cathodic arc system with a spatial separation and a simultaneous execution of different groups of process steps.