COORDINATE MEASURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To obtain an exact measurement result even while promptly executing measurement at high speed when a series of workpieces are measured and inspected by using a coordinate measuring apparatus.

SOLUTION: A coordinate measuring apparatus is constituted so as to execute: a process (28) of measuring a calibrated finished article at high speed; a process (30) of generating an error map corresponding to difference between the calibrated finished article and a measure finished article; a process (34) of measuring the following workpiece at the same high speed; and a process (36) of correcting a measured value of the following workpiece by using the error map, on the coordinate measuring apparatus. The finished article may be one of the workpieces.

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