发明名称 Polishing liquid composition for magnetic disk substrate
摘要 The present invention provides a polishing composition for a magnetic disk substrate that can reduce scratches and surface roughness of a polished substrate without impairing the productivity, and a method for manufacturing a magnetic disk substrate using the polishing composition. The polishing composition for a magnetic disk substrate includes colloidal silica having a &Dgr; CV value of 0 to 10% and water. The &Dgr; CV value is a difference (&Dgr; CV=CV30−CV90) between a value (CV30) obtained by dividing a standard deviation based on a scattering intensity distribution at a detection angle of 30° according to a dynamic light scattering method by an average particle size based on the scattering intensity distribution and multiplying the result by 100 and a value (CV90) obtained by dividing a standard deviation based on a scattering intensity distribution at a detection angle of 90° according to the dynamic light scattering method by an average particle size based on the scattering intensity distribution and multiplying the result by 100.
申请公布号 GB2477067(B) 申请公布日期 2012.10.17
申请号 GB20110008173 申请日期 2009.11.04
申请人 KAO CORPORATION 发明人 YOSHIAKI OSHIMA;TAKESHI HAMAGUCHI;KANJI SATO;NORIHITO YAMAGUCHI;HARUHIKO DOI
分类号 C09K3/14;B24B37/04;C09G1/02 主分类号 C09K3/14
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