发明名称 METHOD FOR DRYING A SUBSTRATE
摘要 A METHOD FOR DRYING WORKPIECES 14 INCLUDES IMMERSING THE WORKPIECES 14 IN A LIQUID BATH 60, RAISING THE WORKPIECES 14 WITH A FIRST HOLDER 20 UNTIL A CENTRAL OPENING OF THE WORKPIECES 14 IS VISIBLE ABOVE LIQUID SURFACE, THEN USING A DRY SECOND HOLDER ROD 30 INSERTED THROUGH SAID CENTRAL OPENING TO CONTINUE RAISING PROCESS. DUE TO THIS, A DRYING PORTION OF THE WORKPIECE 14 IS NOT HELD BY A WET HOLDING MECHANISM. THE PRESENT INVENTION IS ALSO RELATED TO AN APPARATUS 10 FOR DRYING A WORKPIECE 14.
申请公布号 MY146880(A) 申请公布日期 2012.10.15
申请号 MY2006PI04470 申请日期 2006.11.09
申请人 INVENPRO (M) SDN BHD 发明人 NG KAE JENG;LIANG KIEN HUI;LIANG KIEN YEW
分类号 H01L21/302 主分类号 H01L21/302
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