发明名称 Method for Manufacturing of Silicon Thin Film Layer and Apparatus for Manufacturing of Silicon Thin Film Layer
摘要 <p>A method and apparatus for manufacturing a silicon thin film layer and a manufacturing apparatus of a solar cell are disclosed. The manufacturing apparatus of solar cell comprises an outer chamber; an inner chamber disposed within the outer chamber; a container disposed at the inner chamber and which receives a fluid; and a heat exchanger disposed at the outside of the outer chamber and which exchanges heat of the fluid.</p>
申请公布号 KR101190750(B1) 申请公布日期 2012.10.12
申请号 KR20090013857 申请日期 2009.02.19
申请人 发明人
分类号 H01L21/205 主分类号 H01L21/205
代理机构 代理人
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