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发明名称
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SEMICONDUCTOR DEVICES
摘要
申请公布号
KR20120112652(A)
申请公布日期
2012.10.11
申请号
KR20127019678
申请日期
2011.01.05
申请人
LAM RESEARCH CORPORATION
发明人
MIKHAYLICHENKO KATRINA;SYOMIN DENIS;FU QIAN;GALE GLENN W.;LIU SHENJIAN;WILCOXSON MARK H.
分类号
H01L21/027;H01L21/302
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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