| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a structure that allows work etc. on a workpiece to be performed in a clean environment. <P>SOLUTION: An output member 102 is moved in a horizontal direction by first and second motors 104, 105. The output member 102 is moved in a vertical direction by a third motor 108. The output member 102 is turned around a vertical axis by a fourth motor 110. Link mechanisms 106, 107, 109, 112 are provided respectively between the output member 102 and the first, second, third and fourth motors 104, 105, 108, 110. The output member 102 is movable in vertical and horizontal directions and rotatable around the vertical axis without inclining the output member 102 with respect to the vertical direction. The first, second, third and fourth motors 104, 105, 108, 110 are arranged in positions horizontally off the moving region of the output member 102. <P>COPYRIGHT: (C)2013,JPO&INPIT |
