Micro-electro-mechanical sensor for determining movements of substrate, has fixing arrangement provided with two spring beams, which run between anchor and mass in parallel manner

摘要

The micro-electro-mechanical sensor (1) has a substrate (4) and a mass (2) that is stand in connection with the substrate and moved relative to the substrate. Multiple drive elements (3) are assigned to the mass for oscillation driving of the mass along or about a drive axis (z). The mass is connected with the substrate over a fixing arrangement that is fixed between the mass and an anchor (8). The fixing arrangement has two spring beams (6,7), which run between the anchor and the mass in parallel manner. Independent claims are included for the following: (1) a method for adjusting a micro-electro-mechanical sensor; and (2) a method for operating a micro-electro-mechanical sensor.