METHOD AND APPARATUS FOR SURFACE TREATMENT USING A MIXTURE OF ACID AND OXIDIZING GAS,申请号EP20100832728-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR SURFACE TREATMENT USING A MIXTURE OF ACID AND OXIDIZING GAS
摘要
申请公布号	EP2507817(A2)	申请公布日期	2012.10.10
申请号	EP20100832728	申请日期	2010.11.05
申请人	LAM RESEARCH AG	发明人	KUMNIG, ROBERT;SELLMER, REINHARD
分类号	H01L21/311;G03F7/42	主分类号	H01L21/311
代理机构		代理人
主权项
地址

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