Method for forming tco films and thin film stack

摘要

A method for controlling surface morphology of a transparent conductive oxide film (TCO, 104) is provided. A substrate (101) is provided as a basis for forming a solar cell. Onto the substrate (101), a seed layer (103) is deposited. Then, the method includes depositing the transparent conductive oxide film (TCO, 104) above the seed layer 103. The seed layer 103 is adapted to control the surface morphology of the transparent conductive oxide film (104). The surface of the transparent conductive oxide film (104) is etched in order to provide a front contact of the solar cell.