METHOD FOR MANUFACTURING SUBSTRATE HAVING TEXTURED STRUCTURE AND METHOD FOR MANUFACTURING ORGANIC EL ELEMENTS USING SAME

摘要

A method for manufacturing a substrate having an irregularly-textured surface for scattering light, said method including: fabricating a substrate (100) having an irregularly-textured surface; scanning the textured surface (100a) of the fabricated substrate using light (122a) at an angle to the normal of said surface and detecting the light returning from said surface by means of a light-receiving element (124) mounted in the direction of the normal of the surface; and using a processing device (126) to determine the amount of variation in the brightness of the textured surface on the basis of the intensity of the received light. Organic EL elements having diffraction-grating substrates having irregularly-textured surfaces can thus be produced with high throughput.