发明名称 CONFINED CELL STRUCTURES AND METHODS OF FORMING CONFINED CELL STRUCTURES
摘要 Techniques for reducing damage in memory cells are provided. Memory cell structures are typically formed using dry etch and/or planarization processes which damage certain regions of the memory cell structure. In one or more embodiments, certain regions of the cell structure may be sensitive to damage. For example, the free magnetic region in magnetic memory cell structures may be susceptible to demagnetization. Such regions may be substantially confined by barrier materials during the formation of the memory cell structure, such that the edges of such regions are protected from damaging processes. Furthermore, in some embodiments, a memory cell structure is formed and confined within a recess in dielectric material.
申请公布号 US2012248557(A1) 申请公布日期 2012.10.04
申请号 US201113079652 申请日期 2011.04.04
申请人 LIU JUN;SANDHU GURTEJ;MICRON TECHNOLOGY, INC. 发明人 LIU JUN;SANDHU GURTEJ
分类号 H01L29/82;H01L21/8246 主分类号 H01L29/82
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