APPARATUS FOR MANUFACTURING THIN FILM STACKED MEMBER

摘要

Provided is an apparatus for manufacturing a thin film stacked member capable of improving the quality of the thin film stacked member by decreasing creases, heat wrinkles, and tension wrinkles in the film through wrinkle smoothing-out. An apparatus for manufacturing a thin film stacked member transports a strip-shape flexible substrate in a horizontal direction with a width direction of the strip-shape flexible substrate as the vertical direction. The strip-shape flexible substrate is transported to a film deposition portion provided in a transport path of the strip-shape flexible substrate. A thin film is stacked on a surface of the strip-shape flexible substrate by means of a film deposition apparatus provided in the film deposition portion. A temperature-raising portion 20 having a roller heater 21 is provided at least before the first of the film deposition portion 30, and the roller heater 21 is set to increase a temperature of the strip-shape flexible substrate 1 to approximately a temperature of the film deposition portion 30.