| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an absolute pressure sensor that can reduce a whole thickness of the absolute pressure sensor. <P>SOLUTION: An absolute pressure sensor 1 includes a sensor substrate 10 in which a plurality of piezoresistances 12 and 12 are formed on the periphery of a diaphragm 11, and a cavity 13 is formed on the side opposite to the one to form the piezoresistances 12 and 12; a cap substrate 20 that is joined to the sensor substrate 10 so as to close the cavity 13. A thickness T2 of the cavity 13 is equal to or greater than a thickness T3 of the cap substrate 20. <P>COPYRIGHT: (C)2013,JPO&INPIT |
