| 发明名称 |
MEMS-scanning mirror device and method for manufacturing the same |
| 摘要 |
An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon. |
| 申请公布号 |
US8279509(B2) |
申请公布日期 |
2012.10.02 |
| 申请号 |
US20090588804 |
申请日期 |
2009.10.28 |
| 申请人 |
MARUYAMA HIROTAKE;FUJINO MAKOTO;TAMURA HIROKAZU;KABUSHIKI KAISHA TOPCON |
发明人 |
MARUYAMA HIROTAKE;FUJINO MAKOTO;TAMURA HIROKAZU |
| 分类号 |
G02B26/08 |
主分类号 |
G02B26/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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