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发明名称
INLET SYSTEM FOR AN MOCVD REACTOR
摘要
申请公布号
KR101186299(B1)
申请公布日期
2012.09.26
申请号
KR20067019451
申请日期
2005.02.23
申请人
发明人
分类号
C23C16/455;C23C16/00;C23C16/44;C30B25/14;C30B29/40
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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