STEAM OXIDIZATION APPARATUS,申请号EP20030768298-传众专利搜索

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发明名称	STEAM OXIDIZATION APPARATUS
摘要
申请公布号	EP1587136(B1)	申请公布日期	2012.09.26
申请号	EP20030768298	申请日期	2003.12.26
申请人	SONY CORPORATION	发明人	TANAKA, YOSHIYUKI;NARUI, HIRONOBU;YAMAUCHI, YOSHINORI;WATANABE, YOSHIAKI;TANAKA, SADAO
分类号	H01L21/31;H01L21/316;H01L21/00;H01L21/67	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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