发明名称 |
AQUEOUS ALKALINE CLEANING COMPOSITIONS AND METHODS OF THEIR USE |
摘要 |
<p>The aqueous alkaline cleaning composition comprising (A) at least one thioamino acid having at least one secondary or tertiary amino group and at least one mercapto group and (B) at least one quaternary ammonium hydroxide; the use of the alkaline cleaning composition for the processing of substrates useful for fabricating electrical and optical devices; and a method for processing substrates useful for fabricating electrical and optical devices making use of the said aqueous alkaline cleaning composition.</p> |
申请公布号 |
KR20120104149(A) |
申请公布日期 |
2012.09.20 |
申请号 |
KR20127002570 |
申请日期 |
2010.06.24 |
申请人 |
BASF SE |
发明人 |
MELLIES RAIMUND;KLIPP ANDREAS |
分类号 |
C11D3/33;C11D7/32;G03F7/42;H01L21/02 |
主分类号 |
C11D3/33 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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