| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spectral characteristic measuring apparatus which allows spectral characteristics to be precisely measured even in wide-field spectroscopic imaging, and a calibration method thereof. <P>SOLUTION: In a measurement mode, light beams emitted from each bright spot of an object to be measured enter a first and a second reflection parts through a splitting optical system. An imaging optical system allows the light beams reflected therefrom to form an interference image. The movement of the first reflection part elongates or contracts the relative difference in optical path length between the first and the second reflected light beams proceeding from the splitting optical system through the first and the second reflection parts toward the imaging optical system. An interferogram of each bright spot of the object to be measured is obtained based on the light intensity change of the interference image on this occasion. In a calibration mode, the light beams emitted from the bright spot with a prescribed wavelength λ enter the splitting optical system so as to form a plurality of interference images corresponding to the bright spot. The movement distance of the fist reflection part corresponding to one cycle of the light intensity change is obtained based on the light intensity change on this occasion. The installation angle of the first reflection part is obtained from the wavelength λ of the bright spot, the movement distance of the first reflection part, and the field angle θ of the interference image. <P>COPYRIGHT: (C)2012,JPO&INPIT |
