SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD

摘要

Provided is a substrate inspection apparatus capable of easily inspecting a large-sized substrate for defects. The substrate inspection apparatus (100) for detecting defects in a substrate (10) comprises: a robot hand (20) for conveying a substrate (10); an illumination apparatus (32) disposed above a substrate (10), the substrate being supported by the robot hand (20); and a plurality of cameras (34) (34a-34c) for taking an image of a surface (10a) of the substrate (10) using irradiated light (33) from the illumination apparatus (32). The plurality of cameras (34) (34a-34c) takes an image of the entire area of the substrate (10).