| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and method for providing isolation between components in microfabricated devices. <P>SOLUTION: The microfabricated device includes: a base layer; a microfabricated thermal component; and a non-sacrificial aerogel layer in contact with the microfabricated thermal component and supporting the microfabricated thermal component on the base layer. The non-sacrificial aerogel layer is positioned to provide at least one of thermal, electrical or acoustic isolation between the microfabricated thermal component and the base layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
