Method for grinding thin sheet-shaped workpiece by double-end surface grinder, involves holding workpiece between pair of static pressure pads when both side surfaces of thin sheet-shaped workpiece are grinded

摘要

The method involves holding a workpiece (W) between a pair of static pressure pads (1,2) when both side surfaces of the thin sheet-shaped workpiece are grinded. The positions of both side surfaces of the grinded workpiece are measured. The sharpness of the grinding wheels (5,6) is estimated. The grinding conditions are corrected corresponding to the change in the sharpness according to a difference of the sharpness between the grinding wheels for eliminating the difference of sharpness between the grinding wheels. An independent claim is included for a double-end surface grinder with a pair of grinding wheels and a pair of measuring heads.