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发明名称
POWER ASSISTED AUTOMATIC SUPERVISED CLASSIFIER CREATION TOOL FOR SEMICONDUCTOR DEFECTS
摘要
申请公布号
EP1238367(B1)
申请公布日期
2012.09.19
申请号
EP20000982744
申请日期
2000.11.29
申请人
KLA-TENCOR CORPORATION
发明人
BAKER, DAVID;BANERJEE, SAIBAL;SMITH, IAN
分类号
G06T7/00;H01L21/66;G06T5/00
主分类号
G06T7/00
代理机构
代理人
主权项
地址
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