| 摘要 |
[Problem] To provide an induction heating device whereby it is possible to suppress the heat generated from the edge of an opening disposed on a partitioning wall even when magnetic poles are disposed on the exterior of a chamber. [Solution] An induction heating device (10) provided with: a chamber (12) constituting a process chamber; magnetic poles disposed on the outer circumference of the chamber (12) in the vicinity of a magnetic permeable shielding plate (46) for shielding an opening (42) disposed on a housing (26) which functions as a conductive partitioning wall member and constitutes the chamber (12); and induction heating coils wound around the magnetic poles. The induction heating device (10) is characterized in that at least two magnetic poles (32, 34) are disposed on one opening (42) and in that the two magnetic poles (32, 34) have reverse polarity. |
