Metrology system and method applied to an interferometer for remote analysis of a gaseous compound

摘要

The system has a laser beam acquisition subsystem with a convergent lens (48) and a detection subsystem (49) to provide laser signals (400) representing measurement of interference of a metrology laser beam (41) after passing via an interferometer (40). A metrology unit generates synthetic metrology signals for different points of a field of view of the interferometer from the laser signals, where the metrology signals take into account a trajectory of mobile retroreflectors (3) in a space. The unit has a metrology calculation component to estimate differences of absolute optical path lengths. An independent claim is also included for a metrology method for remote analysis of a gaseous compound.