发明名称 |
SPINWAVE BASED NONDESTRUCTIVE MATERIAL, STRUCTURE, COMPONENT, OR DEVICE TESTING TOOLS |
摘要 |
Systems and methods for spinwave-based metrology in accordance with embodiments of the disclosure involve generating and detecting spinwaves in a sample having a ferromagnetic material; and determining a material thickness, a material integrity measure, a presence of a manufacturing defect, a categorical type of manufacturing defect, and/or a manufacturing process statistic corresponding to spinwave behavior in the sample. In an embodiment, spinwaves are generated by way of concurrent exposure of a target measurement site of the sample to each of a bias magnetic field and radiation (e.g., microwave or radio frequency radiation) produced by a first set of integrated waveguides. A response signal corresponding to a behavior of spinwaves within the target measurement site can be generated by way of a second set of integrated waveguides. Various embodiments of systems and methods for generating spinwaves, detecting spinwaves, and calculating, analyzing, or monitoring one or more sample properties can be automated. |
申请公布号 |
WO2012121673(A1) |
申请公布日期 |
2012.09.13 |
申请号 |
WO2012SG00074 |
申请日期 |
2012.03.07 |
申请人 |
NATIONAL UNIVERSITY OF SINGAPORE;YANG, HYUNSOO;MUKHERJEE, SANKHA SUBHRA;KWON, JAE HYUN |
发明人 |
YANG, HYUNSOO;MUKHERJEE, SANKHA SUBHRA;KWON, JAE HYUN |
分类号 |
G01N24/00 |
主分类号 |
G01N24/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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