| 发明名称 |
ALUMINIUM OXIDE-BASED METALLISATION BARRIER |
| 摘要 |
The invention relates to passivation layers based on aluminium oxide, said layers acting simultaneously as diffusion barriers for aluminium and other metals in relation to wafer layers lying below. The invention also relates to a method and suitable compositions for producing said layers.
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| 申请公布号 |
CA2829269(A1) |
申请公布日期 |
2012.09.13 |
| 申请号 |
CA20122829269 |
申请日期 |
2012.02.09 |
| 申请人 |
MERCK PATENT GMBH |
发明人 |
KOEHLER, INGO;DOLL, OLIVER;STOCKUM, WERNER;BARTH, SEBASTIAN |
| 分类号 |
H01L31/18;C23C18/12;C23C24/08;C23C26/00;H01L31/02 |
主分类号 |
H01L31/18 |
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