| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an adsorption member which is capable of suppressing reduction of adsorption power by suppressing clogging of a porous body configuring an adsorption section. <P>SOLUTION: An adsorption member 1A includes an adsorption section 2 formed of a ceramic porous body comprising an adsorption surface 2a which adsorbs an object to be processed, a collection section 3 which surrounds the adsorption section 2 and is formed of a ceramic porous body for collecting processed chips from the object to be processed, and a support section 4 which surrounds the collection section 3 and has a recess for accommodating the adsorption section 2 and the collection section 3 therein. An outer peripheral surface of the adsorption section 2 and an inner peripheral surface of the collection section 3 have step portions 8 which are engaged with each other, and while including the step portions 8, the outer peripheral surface of the adsorption section 2 and the inner peripheral surface of the collection section 3 are joined by a joint member. <P>COPYRIGHT: (C)2012,JPO&INPIT |
