| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming carbon nanotubes which are oriented in a nearly vertical state on a body to be treated and have high density, at a temperature as low as possible. <P>SOLUTION: The carbon nanotube forming method includes: a step of forming catalytic metal fine particles of which the surfaces are oxidized by the action of oxygen plasma on a catalytic metal layer at a temperature T<SB POS="POST">1</SB>(STEP 1); a step of reducing and activating the surfaces of the catalytic metal fine particles by the action of hydrogen plasma on the catalytic metal fine particles at a temperature T<SB POS="POST">2</SB>higher than the temperature T<SB POS="POST">1</SB>(STEP 2); and a step of growing the carbon nanotubes on the activated catalytic metal fine particles by thermal CVD method at a temperature T<SB POS="POST">3</SB>(STEP 3). <P>COPYRIGHT: (C)2012,JPO&INPIT |
