SPLIT TYPE AEROSTATIC BEARING

摘要

Disclosed is a split type aerostatic bearing for supporting a moving table to make friction-free movement on a platform (4). The aerostatic bearing comprises an aerostatic bearing plate (6), air floating elements (2'a, 2'b, 2'c, 2'd) disposed on the aerostatic bearing plate (6), a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6), wherein the vacuum pre-tightening structure (7)is connected with the aerostatic bearing plate (6) in a split style. By separating the air-floating elements (2'a, 2'b, 2'c, 2'd) from the vacuum pre-tightening structure (7), adverse impact of the aerostatic bearing plate (6) exerted on air-floating area can be avoided when the aerostatic bearing plate is bended under a pre-tightening force.