发明名称 |
POLISHING PAD HAVING MICRO-GROOVES ON THE PAD SURFACE |
摘要 |
<p>A polishing pad is provided herein, which may include a plurality of soluble fibers having a diameter in the range of about 5 to 80 micrometers, and an insoluble component. The pad may also pad include a first surface having a plurality of micro-grooves, wherein the soluble fibers form the micro-grooves in the pad. The micro-grooves may have a width and/or depth up to about 150 micrometers. In addition, a method of forming the polishing pad and a method of polishing a surface with the polishing pad is disclosed.</p> |
申请公布号 |
EP2040878(A4) |
申请公布日期 |
2012.09.12 |
申请号 |
EP20070813129 |
申请日期 |
2007.07.19 |
申请人 |
INNOPAD, INC. |
发明人 |
HSU, OSCAR, K.;JIN, MARC, C.;WELLS, DAVID, ADAM;ALDEBORGH, JOHN, ERIK |
分类号 |
B24B37/24;B24B37/26 |
主分类号 |
B24B37/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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