发明名称 PHOTON BEAM SCANNER AND PHOTON BEAM SCANNING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To facilitate collision of an electron beam and laser light. <P>SOLUTION: A path control device makes an electron beam E generated and laser light R collide with each other by controlling the paths of the electron beam E and laser light R. The path control device includes: an electron beam control part 7 which makes the electron beam E incident at a first focus 11 of a virtually set ellipse 10 by controlling the path of the electron beam E and changes the angle of incidence at the first focus 11; a laser light control part 8 which changes the traveling direction of the laser light R traveling from a second focus 12 of the ellipse 10 toward a part of the ellipse 10; and an elliptic surface mirror 9 which has a reflecting surface 19 along a part of the ellipse 10 and reflects the laser light R incident on the reflecting surface 19 from the second focus 12 to make the laser light R incident at the first focus 11 from the opposite side from the electron beam E. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012173076(A) 申请公布日期 2012.09.10
申请号 JP20110034193 申请日期 2011.02.21
申请人 KYOTO UNIV 发明人 KII TOSHITERU
分类号 G21K5/02;G21K1/00;H05G2/00 主分类号 G21K5/02
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