| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve throughput through automatic setting without the interposition of humans and reduction of the data amount. <P>SOLUTION: An image generation method includes a blur measurement step for imaging an object on a stage by an imaging unit, a determination step for determining the number of images of the object by analysing image data obtained by the blur measurement step, and a main measurement step for executing first processing for imaging the object on the stage and obtaining data of one image according to the number of images determined in the determination step or second processing for obtaining the image data of a plurality of images with different focal positions by imaging the object on the stage multiple times, while changing the focal position. <P>COPYRIGHT: (C)2012,JPO&INPIT |
