发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device has a first insulating film formed over a semiconductor substrate, a first opening formed in the first insulating film, a first manganese oxide film formed along an inner wall of the first opening, a first copper wiring embedded in the first opening, and a second manganese oxide film formed on the first copper wiring including carbon.
申请公布号 KR101179973(B1) 申请公布日期 2012.09.07
申请号 KR20080120989 申请日期 2008.12.02
申请人 发明人
分类号 H01L21/3205;H01L21/28 主分类号 H01L21/3205
代理机构 代理人
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