| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a metalization film without causing damage. <P>SOLUTION: A belt like plastic film 12 and a belt like support plate 16 are bonded to each other and are brought into a vapor deposition chamber 36 through a differential pressure sealing mechanism 30 while being bonded to each other. A metal film is deposited on the film 12 in the vapor deposition chamber 36 and a metalization film 44 on which a metal film is deposited and the support plate 16 are ejected from the vapor deposition chamber 36 through the differential pressure sealing mechanism 30 with the metalization film 44 bonded to the support plate 16. Then, the support plate 16 is removed from the metalization film. <P>COPYRIGHT: (C)2012,JPO&INPIT |
