PLASMA GENERATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a plasma generating device for efficiently treating a gas when plasma is generated in the atmosphere by applying voltage on the gas containing a gas component to be treated.

SOLUTION: The plasma generating device has a rod-like electrode to which power is supplied and a metal made cylindrical casing having an internal space into which the rod-like electrode is provided. An electrode side dielectric barrier layer is provided to the first end part of the rod-like electrode to be opposed to the first end surface of one of end parts of the cylindrical casing to protect the first end surface. A supply port for supplying the gas is provided to the first end surface of the cylindrical casing and a casing side dielectric barrier layer is provided to the first end surface of the cylindrical casing to cover the periphery of the supply port. When an edge part on the periphery in the first end of the rod-like electrode is projected on the first end surface of the cylindrical casing in parallel in the longitudinal direction, the edge part on the periphery is projected in a region on the casing side dielectric barrier layer or on the supply port.

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