发明名称 |
SUBSTRATE HOLDER POSITIONING METHOD AND SUBSTRATE PROCESSING SYSTEM |
摘要 |
A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder included in a substrate carrying mechanism; carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; measuring a second position of the substrate transferred from the substrate rotating unit to the substrate holder; determining the position of the center of rotation of the substrate rotating unit on the basis of the first and the second position; and positioning the substrate holder on the basis of the position of the center of rotation.
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申请公布号 |
US2012224945(A1) |
申请公布日期 |
2012.09.06 |
申请号 |
US201213405918 |
申请日期 |
2012.02.27 |
申请人 |
DOUKI YUICHI;HAYASHI TOKUTAROU;IIDA NARUAKI;ENOKIDA SUGURU;TOKYO ELECTRON LIMITED |
发明人 |
DOUKI YUICHI;HAYASHI TOKUTAROU;IIDA NARUAKI;ENOKIDA SUGURU |
分类号 |
H01L21/68 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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