发明名称 |
CHARGED PARTICLE RADIATION APPARATUS, AND METHOD FOR DISPLAYING THREE-DIMENSIONAL INFORMATION IN CHARGED PARTICLE RADIATION APPARATUS |
摘要 |
<p>Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.</p> |
申请公布号 |
EP2495748(A1) |
申请公布日期 |
2012.09.05 |
申请号 |
EP20100826621 |
申请日期 |
2010.10.22 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
YAGUCHI TOSHIE;NAGAKUBO YASUHIRA;AZUMA JUNZO;WATABE AKIRA |
分类号 |
H01J37/20;G01N1/28;G01N23/225;H01J37/18;H01J37/24;H01J37/26 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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