| 摘要 |
PROBLEM TO BE SOLVED: To provide novel antenna structure and power supply method for causing generation of a standing wave to substantially disappear, to provide a discharge device having high plasma evenness, a plasma treatment method of a large-surface substrate and a solar cell having high productivity. SOLUTION: A plurality of U-shaped antenna elements, both ends of which are used as a power supply end and an earth end, respectively, are arranged with equal intervals on a plane in such a manner that the earth end and the power supply end alternate to construct an array antenna, a phase is changed 180 deg. in order from the end of the power supply end to supply AC power of the same frequency at a time, the length of a linear conductor is determined at the frequency of 10 MHz-2 GHz in such a manner that the ratio of a reflected wave measured at the power supply end to a progressive wave measured at the power supply end is 0.1 or lower. When α is regarded as a subtrahend constant, the length La (m) of the linear conductor is controlled to 0.5(1/α)<La<10(1/α). |
