Method and apparatus for reducing contamination in a grating light valve imaging system.

摘要

A method and apparatus for reducing contamination on the protective lids of a grating light valve (GLV) and a calibration sensor (300) in an imaging system (10). A shroud (102) surrounds the protective lid (306) of the GLV/sensor. An airflow system (104) inputs a stream of air into the shroud (102), and the shroud (102) directs the stream of air away from the GLV/sensor. A pellicle (200) may also be used to enclose the GLV/sensor to prevent contamination of the protective lid (306).