VACUUM DEVICE AND LUBRICATING OIL USED THEREIN

摘要

When an ionic liquid is slid in a vacuum device under severe conditions, the ionic liquid may decompose and cause the inside of the vacuum device to be contaminated by the decomposition product. In order to prevent the contamination, the lubricating oil used in a driving mechanism disposed in a vacuum chamber surrounding a sample includes a hydrophobic anion and a hydrophobic cation. As the hydrophobic anion, an anion which has moderate viscosity and does not have a weak bond, such as a C-C bond, to avoid the release of impurities (e.g., [N(CF3SO2)2]-) is used.