SILANE COMPOUND AND COMPOSITION FOR FORMATION OF MONOLAYER OR MULTILAYER USING SAME

摘要

[Problem] To provide a novel silane compound and a composition for formation of a monolayer or a multilayer on a substrate. [Solution] A composition for formation of a monolayer or a multilayer containing a silane compound represented by formula (1A) or formula (1B), and an organic solvent. [Chem 1] [In the formulae, each R1 independently represents a methyl group or an ethyl group, each X independently represents a C1-10 linking group, Z represents a phthalic imide group, a maleimide group, or a succinic imide group which may have at least one substituent, each Ar independently represents a phenyl group or a naphthyl group, and the linking group represented by X may contain at least one oxygen atom or sulfur atom in the main chain, and when the Ar is a phenyl group, the phenyl group may have at least one substituent.]