| 摘要 |
PURPOSE: A retainer ring for polishing a wafer and a manufacturing method thereof are provided to reduce manufacturing costs. CONSTITUTION: A frame ring(10) is made of metal and is mounted on a carrier. A plurality of retaining members(30) are insert-molded to form an arc which divides the circumference of a circle which corresponds to the frame ring. When the frame ring faces the plurality of retaining members, an intermediate member is formed to combine the frame ring with the retaining members by an insert- molding method to insert-mold melt resins between the frame ring and the retaining member.
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