ANTENNA CARRIER, ARRAY ANTENNA TYPE PLASMA CVD DEVICE, AND METHOD FOR CARRYING ANTENNA FOR ARRAY ANTENNA TYPE PLASMA CVD DEVICE AND SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To simplify the maintenance work of an array antenna unit without enlarging a device while inhibiting cost increase.

SOLUTION: Two or more ceiling side connectors electrically connected to a high-frequency power source are provided in the ceiling part 2a of a vacuum chamber 1. The array antenna unit 30 has a plurality of pole bolts connectable to the ceiling side connectors, and plasma is generated by power supply from the high-frequency power source in such a state that the pole bolts are connected to the ceiling side connectors. A guide rail 17 for guiding the wheel 62 of a substrate carrier 60 for holding a substrate is provided in the vacuum chamber 1. An antenna carrier 70 has a wheel 72 guided by the common guide rail 17 with the substrate carrier 60, and is made to be movable in the vacuum chamber 1 in such a state as to detachably hold the array antenna unit 30.

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