发明名称 METHOD FOR PRODUCING A SUBSTRATE HOLDER
摘要 The invention relates to a method for producing a holder for at least one substrate from a first (P1) and second (P2) plate that each include first and second parallel planar surfaces, the method comprising the steps of: a) defining, on the first planar surface of the second plate (P2), a plurality of surfaces (6), using an area in which the direct adhesion to a so-called non-adherable surface of the first plate (P1) is prevented; b) placing the first surface of the second plate (P2) in contact with the first surface of the first plate (P1); c) directly adhering said first surfaces together except in the non-adherable area; and d) drawing back the portions of the second plate (P2) located vertically perpendicular to the surfaces (6) inside the non-adherable area.
申请公布号 WO2012110591(A1) 申请公布日期 2012.08.23
申请号 WO2012EP52672 申请日期 2012.02.16
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;FOURNEL, FRANK;BALLY, LAURENT;ZUSSY, MARC 发明人 FOURNEL, FRANK;BALLY, LAURENT;ZUSSY, MARC
分类号 H01L21/20;H01L21/683 主分类号 H01L21/20
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