| 摘要 |
<p>A glass substrate detaching apparatus that is capable of efficiently, stably detaching a glass substrate from an adsorption sheet. There is provided a method of detaching a platelike substance held by adsorption on an adsorption sheet from the adsorption sheet, characterized in that detaching of the platelike substance from the adsorption sheet is carried out by retaining the platelike substance held by adsorption on an adsorption sheet from the plane opposite to the adsorption sheet by multiple adsorption pads; emitting a jet of pressurized water through a pressurized water supply nozzle toward a boundary region between the platelike substance and the adsorption sheet to thereby cause an edge of the platelike substance to depart from the adsorption sheet; and while further feeding a pressurized water to the interstice between the departed edge of the platelike substance and the adsorption sheet to thereby cancel the adsorption of the platelike substance onto the adsorption sheet, moving the adsorption pads in the direction of detachment.</p> |
