| 摘要 |
An apparatus for measuring a shape of a surface comprises: a measurement head including a division unit that divides light into reference light and test light, a reference surface, a light-condensing unit that condenses the test light onto the surface, and a first detector that detects interfering light between the test light Cat's Eye-reflected by the surface and the reference light reflected by the reference surface; a driving unit that drives the measurement head along the surface; a second detector that detects a position of the measurement head; and a processor that obtains a Gouy phase generated by diffraction of the test light on the surface, calculates a phase difference between the test light and the reference light based on information of the detected interfering light, and calculates the shape of the surface from the detected position of the measurement head, the obtained Gouy phase, and the calculated phase difference.
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